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| 1. | projection stepper |
| 步进式投影曝光装置 |
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| 2. | The mechanical mechanic knows the technique and technology of the echo（回声、重复、共鸣） mechanism（机械装置、机构）. |
| 呆板的机修工知道共鸣装置的技术和工艺. |
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| 3. | automatic exposure unit |
| 自动曝光装置 |
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| 4. | reduction aligner |
| 收缩式投影曝光装置 |
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| 5. | variable shaped electron beam exposure system |
| 可变电子束曝光装置 |
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| 6. | unity magnification projection unit |
| 单位放大投影曝光装置 |
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| 7. | far contact printer |
| 接近式曝光装置 |
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| 8. | x ray align and exposure equipment |
| x 射线对准曝光装置 |
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| 9. | electron beam projection exposure apparatus |
| 电子束投影曝光装置 |
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| 10. | one to one projection system |
| 一比一投影曝光装置 |
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