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11. | blanket exposure |
| 全面曝光 |
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12. | full wafer exposure |
| 整片曝光 |
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13. | projection exposure |
| 投影曝光 |
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14. | exposure monitor |
| 曝光监测器 |
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15. | Exposure table |
| 曝光表格 |
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16. | oblique exposure |
| 斜曝光 |
|
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17. | supplementary exposure |
| 附加曝光 |
|
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18. | Exposure memory |
| 曝光记忆 |
|
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| |
19. | exposure determination |
| 曝光测定 |
|
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20. | exposure source |
| 曝光辐射源 |
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